Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6439155 | Remote plasma generator with sliding short tuner | Mohammad Kamarehi | 2002-08-27 |
| 6412438 | Downstream sapphire elbow joint for remote plasma generator | Mohammad Kamarehi | 2002-07-02 |
| 6409932 | Method and apparatus for increased workpiece throughput | Albert Wang, Scott J. Baron, Prasad Padmanabhan | 2002-06-25 |
| 6352050 | Remote plasma mixer | Mohammad Kamarehi | 2002-03-05 |