Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6439155 | Remote plasma generator with sliding short tuner | Gerald M. Cox | 2002-08-27 |
| 6412438 | Downstream sapphire elbow joint for remote plasma generator | Gerald M. Cox | 2002-07-02 |
| 6352050 | Remote plasma mixer | Gerald M. Cox | 2002-03-05 |