Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6499777 | End-effector with integrated cooling mechanism | — | 2002-12-31 |
| 6461801 | Rapid heating and cooling of workpiece chucks | — | 2002-10-08 |
| 6409932 | Method and apparatus for increased workpiece throughput | Scott J. Baron, Prasad Padmanabhan, Gerald M. Cox | 2002-06-25 |