Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6462483 | Induction plasma processing chamber | David Guang-Kai Jeng, Tsung-Nane Kuo, Hong-Ji Lee | 2002-10-08 |
| 6451161 | Method and apparatus for generating high-density uniform plasma | David Guang-Kai Jeng, Hong-Ji Lee, Ching-An CHEN, Tsung-Nane Kuo, Jui-Hung Yeh | 2002-09-17 |