Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451161 | Method and apparatus for generating high-density uniform plasma | David Guang-Kai Jeng, Hong-Ji Lee, Fred Chen, Ching-An CHEN, Tsung-Nane Kuo | 2002-09-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451161 | Method and apparatus for generating high-density uniform plasma | David Guang-Kai Jeng, Hong-Ji Lee, Fred Chen, Ching-An CHEN, Tsung-Nane Kuo | 2002-09-17 |