Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6462483 | Induction plasma processing chamber | David Guang-Kai Jeng, Fred Chen, Tsung-Nane Kuo | 2002-10-08 |
| 6451161 | Method and apparatus for generating high-density uniform plasma | David Guang-Kai Jeng, Fred Chen, Ching-An CHEN, Tsung-Nane Kuo, Jui-Hung Yeh | 2002-09-17 |
| 6398430 | Semiconductor device fabrication system | Gyu-chan Jeoung, Kwang-Seok Choi, Jin-hang Jung, Young Sun Kim, Hoe-Sik Chung +2 more | 2002-06-04 |
| 6358672 | Method of forming semiconductor device pattern including cross-linking and flow baking a positive photoresist | Gyu-chan Jeoung, Kwang-Seok Choi, Jin-hang Jung, Young Sun Kim, Hoe-Sik Chung +2 more | 2002-03-19 |