Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498399 | Low dielectric-constant dielectric for etchstop in dual damascene backend of integrated circuits | James Hao-An Chen Lin | 2002-12-24 |
| 6472124 | Self-aligned metal-insulator-metal capacitor for integrated circuits | — | 2002-10-29 |
| 6452275 | Fabrication of integrated circuits with borderless vias | — | 2002-09-17 |
| 6403424 | Method for forming self-aligned mask read only memory by dual damascene trenches | Chung-Yeh Lee, Pei-Ren Jeng | 2002-06-11 |
| 6395607 | Integrated circuit fabrication method for self-aligned copper diffusion barrier | — | 2002-05-28 |
| 6383912 | Fabrication method of integrated circuits with multiple low dielectric-constant intermetal dielectrics | James Hao-An Chen Lin | 2002-05-07 |