Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498399 | Low dielectric-constant dielectric for etchstop in dual damascene backend of integrated circuits | Henry Chung | 2002-12-24 |
| 6383912 | Fabrication method of integrated circuits with multiple low dielectric-constant intermetal dielectrics | Henry Chung | 2002-05-07 |