Issued Patents 2002
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6474257 | High density plasma chemical vapor deposition chamber | — | 2002-11-05 |
| 6472271 | Planarization method of memory unit of flash memory | — | 2002-10-29 |
| 6455440 | Method for preventing polysilicon stringer in memory device | — | 2002-09-24 |
| 6407454 | Inter-metal dielectric layer | Ping-Yi Chang, Chi-Tung Huang | 2002-06-18 |
| 6403428 | Method of forming shallow trench isolation | — | 2002-06-11 |
| 6403424 | Method for forming self-aligned mask read only memory by dual damascene trenches | Chung-Yeh Lee, Henry Chung | 2002-06-11 |
| 6403470 | Method for fabricating a dual damascene structure | — | 2002-06-11 |
| 6391718 | Planarization method for flash memory device | — | 2002-05-21 |
| 6380068 | Method for planarizing a flash memory device | Shu-Li Wu | 2002-04-30 |
| 6372660 | Method for patterning a dual damascene with masked implantation | — | 2002-04-16 |
| 6335274 | Method for forming a high-RI oxide film to reduce fluorine diffusion in HDP FSG process | Shu-Li Wu | 2002-01-01 |
| 6335259 | Method of forming shallow trench isolation | — | 2002-01-01 |