Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6499003 | Method and apparatus for application of proximity correction with unitary segmentation | Edwin Jones, Dusan Petranovic, Ranko Scepanovic, Nicholas F. Pasch, Mario Garza +3 more | 2002-12-24 |
| 6426286 | Interconnection system with lateral barrier layer | Valeriy Sukharev | 2002-07-30 |
| 6391795 | Low k dielectric composite layer for intergrated circuit structure which provides void-free low k dielectric material between metal lines while mitigating via poisoning | Wilbur G. Catabay | 2002-05-21 |
| 6350700 | Process for forming trenches and vias in layers of low dielectric constant carbon-doped silicon oxide dielectric material of an integrated circuit structure | Wilbur G. Catabay, Philippe Schoenborn | 2002-02-26 |