Issued Patents 2002
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6499003 | Method and apparatus for application of proximity correction with unitary segmentation | Edwin Jones, Dusan Petranovic, Ranko Scepanovic, Richard Schinella, Mario Garza +3 more | 2002-12-24 |
| 6486056 | Process for making integrated circuit structure with thin dielectric between at least local interconnect level and first metal interconnect level | Rajat Rakkhit | 2002-11-26 |
| 6458508 | Method of protecting acid-catalyzed photoresist from chip-generated basic contaminants | Shumay X. Dou, Colin D. Yates | 2002-10-01 |
| 6455934 | Polymeric dielectric layers having low dielectric constants and improved adhesion to metal lines | — | 2002-09-24 |
| 6425117 | System and method for performing optical proximity correction on the interface between optical proximity corrected cells | Nicholas K. Eib, Colin D. Yates, Shumay X. Dou | 2002-07-23 |
| 6418353 | Automating photolithography in the fabrication of integrated circuits | Michael D. Rostoker, Ashok K. Kapoor | 2002-07-09 |
| 6407559 | Laser fault correction of semiconductor devices | — | 2002-06-18 |
| 6383414 | Use of corrosion inhibiting compounds to inhibit corrosion of metal plugs in chemical-mechanical polishing | — | 2002-05-07 |