Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6466599 | Discharge unit for a high repetition rate excimer or molecular fluorine laser | Igor Bragin, Uwe Stamm, Ulrich Rebhan | 2002-10-15 |
| 6430205 | Discharge unit for a high repetition rate excimer or molecular fluorine laser | Igor Bragin, Uwe Stamm, Ulrich Rebhan | 2002-08-06 |
| 6414978 | Discharge unit for a high repetition rate excimer or molecular fluorine laser | Igor Bragin, Uwe Stamm, Ulrich Rebhan | 2002-07-02 |