Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6493364 | Beam shutter for excimer laser | Jurgen Baumler, Markus Ritcher | 2002-12-10 |
| 6466599 | Discharge unit for a high repetition rate excimer or molecular fluorine laser | Igor Bragin, Vadim Berger, Uwe Stamm | 2002-10-15 |
| 6430205 | Discharge unit for a high repetition rate excimer or molecular fluorine laser | Igor Bragin, Vadim Berger, Uwe Stamm | 2002-08-06 |
| 6414828 | Laser ventilation system | Kay Zimmerman | 2002-07-02 |
| 6414978 | Discharge unit for a high repetition rate excimer or molecular fluorine laser | Igor Bragin, Vadim Berger, Uwe Stamm | 2002-07-02 |