Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500755 | Resist trim process to define small openings in dielectric layers | Srikanteswara Dakshina-Murthy, Paul R. Besser, Jonathan B. Smith, Eric M. Apelgren, Christian Zistl +2 more | 2002-12-31 |
| 6406993 | Method of defining small openings in dielectric layers | Srikanteswara Dakshina-Murthy, Paul R. Besser, Jonathan B. Smith, Eric M. Apelgren, Christian Zistl +2 more | 2002-06-18 |