Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468911 | Method of chemical/mechanical polishing of the surface of semiconductor device | Takeshi Nishioka | 2002-10-22 |
| 6354913 | Abrasive and method for polishing semiconductor substrate | Yoshihiro Minami, Kenji Doi, Jun Takayasu, Hiroyuki Kohno, Hiroshi Kato +1 more | 2002-03-12 |