Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6354913 | Abrasive and method for polishing semiconductor substrate | Naoto Miyashita, Yoshihiro Minami, Kenji Doi, Hiroyuki Kohno, Hiroshi Kato +1 more | 2002-03-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6354913 | Abrasive and method for polishing semiconductor substrate | Naoto Miyashita, Yoshihiro Minami, Kenji Doi, Hiroyuki Kohno, Hiroshi Kato +1 more | 2002-03-12 |