Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6445842 | Microelectromechanical optical cross-connect switches including mechanical actuators and methods of operating same | Edward A. Hill | 2002-09-03 |
| 6428173 | Moveable microelectromechanical mirror structures and associated methods | Mark D. Walters, Edward A. Hill, Allen Cowen | 2002-08-06 |
| 6410361 | Methods of fabricating in-plane MEMS thermal actuators | Edward A. Hill, Allen Cowen | 2002-06-25 |
| 6386507 | Microelectromechanical valves including single crystalline material components | Mark D. Walters | 2002-05-14 |
| 6367252 | Microelectromechanical actuators including sinuous beam structures | Edward A. Hill, Allen Cowen, Ramaswamy Mahadevan, Robert L. Wood | 2002-04-09 |
| 6360539 | Microelectromechanical actuators including driven arched beams for mechanical advantage | Edward A. Hill, Allen Cowen, Ramaswamy Mahadevan, Robert L. Wood | 2002-03-26 |
| 6351580 | Microelectromechanical devices having brake assemblies therein to control movement of optical shutters and other movable elements | Edward A. Hill | 2002-02-26 |