Issued Patents 2002
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6496351 | MEMS device members having portions that contact a substrate and associated methods of operating | Ramaswamy Mahadevan | 2002-12-17 |
| 6491404 | Microelectromechanical apparatus with tiltable bodies including variable tilt-stop engaging portions and methods of operation and fabrication therefor | — | 2002-12-10 |
| 6490382 | MicroElectroMechanical optical cross-connect switches having reduced numbers of reflectors therein and methods of operating same | — | 2002-12-03 |
| 6445842 | Microelectromechanical optical cross-connect switches including mechanical actuators and methods of operating same | Vijayakumar R. Dhuler | 2002-09-03 |
| 6428173 | Moveable microelectromechanical mirror structures and associated methods | Vijayakumar R. Dhuler, Mark D. Walters, Allen Cowen | 2002-08-06 |
| 6410361 | Methods of fabricating in-plane MEMS thermal actuators | Vijayakumar R. Dhuler, Allen Cowen | 2002-06-25 |
| 6400550 | Variable capacitors including tandem movers/bimorphs and associated operating methods | Robert L. Wood, Vivek Agrawal, Ramaswamy Mahadevan | 2002-06-04 |
| 6396975 | MEMS optical cross-connect switch | Robert L. Wood, Ramaswamy Mahadevan | 2002-05-28 |
| 6367252 | Microelectromechanical actuators including sinuous beam structures | Vijayakumar R. Dhuler, Allen Cowen, Ramaswamy Mahadevan, Robert L. Wood | 2002-04-09 |
| 6366186 | Mems magnetically actuated switches and associated switching arrays | Ramaswamy Mahadevan | 2002-04-02 |
| 6360539 | Microelectromechanical actuators including driven arched beams for mechanical advantage | Vijayakumar R. Dhuler, Allen Cowen, Ramaswamy Mahadevan, Robert L. Wood | 2002-03-26 |
| 6351580 | Microelectromechanical devices having brake assemblies therein to control movement of optical shutters and other movable elements | Vijayakumar R. Dhuler | 2002-02-26 |