Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6428173 | Moveable microelectromechanical mirror structures and associated methods | Vijayakumar R. Dhuler, Mark D. Walters, Edward A. Hill | 2002-08-06 |
| 6410361 | Methods of fabricating in-plane MEMS thermal actuators | Vijayakumar R. Dhuler, Edward A. Hill | 2002-06-25 |
| 6367252 | Microelectromechanical actuators including sinuous beam structures | Edward A. Hill, Vijayakumar R. Dhuler, Ramaswamy Mahadevan, Robert L. Wood | 2002-04-09 |
| 6360539 | Microelectromechanical actuators including driven arched beams for mechanical advantage | Edward A. Hill, Vijayakumar R. Dhuler, Ramaswamy Mahadevan, Robert L. Wood | 2002-03-26 |