Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6483586 | Beam splitting analyzer means in rotating compensator ellipsometer | Blaine D. Johs, Craig M. Herzinger, Jeffrey S. Hale | 2002-11-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6483586 | Beam splitting analyzer means in rotating compensator ellipsometer | Blaine D. Johs, Craig M. Herzinger, Jeffrey S. Hale | 2002-11-19 |