Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6483586 | Beam splitting analyzer means in rotating compensator ellipsometer | Blaine D. Johs, Steven E. Green, Jeffrey S. Hale | 2002-11-19 |
| 6455853 | Determination of thickness and impurity profiles in thin membranes utilizing spectorscopic data obtained from ellipsometric investigation of both front and back surfaces | Thomas E. Tiwald | 2002-09-24 |
| 6456376 | Rotating compensator ellipsometer system with spatial filter | Martin M. Liphardt, Blaine D. Johs, Ping He | 2002-09-24 |
| 6441902 | Method for evaluating sample system anisotropic refractive indices and orientations thereof in multiple dimensions | James N. Hilfiker, Corey L. Bungay | 2002-08-27 |
| 6353477 | Regression calibrated spectroscopic rotating compensator ellipsometer system with pseudo-achromatic retarder system | Blaine D. Johs | 2002-03-05 |