Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6483586 | Beam splitting analyzer means in rotating compensator ellipsometer | Craig M. Herzinger, Steven E. Green, Jeffrey S. Hale | 2002-11-19 |
| 6456376 | Rotating compensator ellipsometer system with spatial filter | Martin M. Liphardt, Craig M. Herzinger, Ping He | 2002-09-24 |
| 6353477 | Regression calibrated spectroscopic rotating compensator ellipsometer system with pseudo-achromatic retarder system | Craig M. Herzinger | 2002-03-05 |