Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6448169 | Apparatus and method for use in manufacturing semiconductor devices | William Brearley, Laertis Economikos, Kimberley A. Kelly, Bouwe W. Leenstra, Arthur G. Merryman +4 more | 2002-09-10 |