Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6365321 | Blends of hydroxystyrene polymers for use in chemically amplified positive resist formulations | Kuang-Jung Chen, Ronald A. DellaGuardia, Hiroshi Ito, Ahmad D. Katnani | 2002-04-02 |