Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6455434 | Prevention of slurry build-up within wafer topography during polishing | Chad R. Binkerd, Jose Luis Cruz, Timothy C. Krywanczyk, Brian D. Pfeifer, Rosemary A. Previti-Kelly +1 more | 2002-09-24 |