Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6384909 | Defect inspection method and apparatus for silicon wafer | Koji Tomita, Shigeru Matsui, Yoshitaka Kodama, Hitoshi Komuro, Kazuo Takeda | 2002-05-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6384909 | Defect inspection method and apparatus for silicon wafer | Koji Tomita, Shigeru Matsui, Yoshitaka Kodama, Hitoshi Komuro, Kazuo Takeda | 2002-05-07 |