Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6441383 | Charged particle beam lithography apparatus for forming pattern on semi-conductor | Hiroyuki Ito, Yasunari Sohda, Yasuhiro Someda, Yoshinori Nakayama, Hidetoshi Satoh | 2002-08-27 |
| 6403973 | Electron beam exposure method and apparatus and semiconductor device manufactured using the same | Hiroyuki Takahashi, Koji Nagata, Kimiaki Ando | 2002-06-11 |