Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6441383 | Charged particle beam lithography apparatus for forming pattern on semi-conductor | Hiroyuki Ito, Yasunari Sohda, Yasuhiro Someda, Yoshinori Nakayama, Masahide Okumura | 2002-08-27 |