Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6452197 | Ion implantation apparatus and method of implanting ions to prevent charge build up on a substrate | — | 2002-09-17 |
| 6441383 | Charged particle beam lithography apparatus for forming pattern on semi-conductor | Yasunari Sohda, Yasuhiro Someda, Yoshinori Nakayama, Masahide Okumura, Hidetoshi Satoh | 2002-08-27 |
| 6422590 | Holder for mounting an air bag module | Fumio Umezawa, Tatsuya Terauchi, Makoto Kurita, Naohiro Takahashi | 2002-07-23 |
| 6398420 | Rolling bearing device | Susumu Tanaka | 2002-06-04 |
| 6359286 | Method and apparatus for neutralizing space charge in an ion beam | Stephen Moffatt | 2002-03-19 |