Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465137 | Resist composition and pattern forming process | Keiji Watanabe, Ei Yano, Takahisa Namiki, Koji Nozaki, Junichi Kon +4 more | 2002-10-15 |
| 6342562 | Silicon-containing polymer, process for its production, resist composition employing it, pattern-forming method and electronic device fabrication method | Keiji Watanabe, Ei Yano | 2002-01-29 |