Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465137 | Resist composition and pattern forming process | Miwa Kozawa, Ei Yano, Takahisa Namiki, Koji Nozaki, Junichi Kon +4 more | 2002-10-15 |
| 6457222 | Method of manufacturing ink jet print head | Takuji Torii, Nobuhiro Noto, Yoshitaka Akiyama, Kenichi Kugai, Nobuhiro Kurosawa +2 more | 2002-10-01 |
| 6342562 | Silicon-containing polymer, process for its production, resist composition employing it, pattern-forming method and electronic device fabrication method | Miwa Kozawa, Ei Yano | 2002-01-29 |