Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465137 | Resist composition and pattern forming process | Keiji Watanabe, Miwa Kozawa, Takahisa Namiki, Koji Nozaki, Junichi Kon +4 more | 2002-10-15 |
| 6451501 | Acid sensitive copolymer, resist composition and resist pattern forming method | Koji Nozaki | 2002-09-17 |
| 6342562 | Silicon-containing polymer, process for its production, resist composition employing it, pattern-forming method and electronic device fabrication method | Miwa Kozawa, Keiji Watanabe | 2002-01-29 |
| 6338903 | Resin composition for semiconductor encapsulation, method and apparatus for producing the composition, as well as semiconductor device using the composition | Yukio Takigawa | 2002-01-15 |