Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489225 | Method for controlling dopant profiles and dopant activation by electron beam processing | Charles Hannes, William R. Livesay | 2002-12-03 |
| 6426127 | Electron beam modification of perhydrosilazane spin-on glass | Heike Thompson | 2002-07-30 |
| 6358670 | Enhancement of photoresist plasma etch resistance via electron beam surface cure | Selmer Wong | 2002-03-19 |