Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489225 | Method for controlling dopant profiles and dopant activation by electron beam processing | Matthew Ross, Charles Hannes | 2002-12-03 |
| 6407399 | Uniformity correction for large area electron source | — | 2002-06-18 |