Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6358670 | Enhancement of photoresist plasma etch resistance via electron beam surface cure | Matthew Ross | 2002-03-19 |
| 6340556 | Tailoring of linewidth through electron beam post exposure | — | 2002-01-22 |