Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6488774 | Trap apparatus | Kuniaki Horie, Masahito Abe, Tsutomu Nakada | 2002-12-03 |
| 6458694 | High energy sputtering method for forming interconnects | Naoaki Ogure, Takao Kato, Kuniaki Horie | 2002-10-01 |
| 6387182 | Apparatus and method for processing substrate | Kuniaki Horie, Yukio Fukunaga, Naoaki Ogure, Tsutomu Nakada, Masahito Abe +3 more | 2002-05-14 |