Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6488774 | Trap apparatus | Masahito Abe, Tsutomu Nakada, Yuji Araki | 2002-12-03 |
| 6458694 | High energy sputtering method for forming interconnects | Naoaki Ogure, Takao Kato, Yuji Araki | 2002-10-01 |
| 6419462 | Positive displacement type liquid-delivery apparatus | Yukio Fukunaga, Akihisa Hongo, Kiwamu Tsukamoto, Kenji Kamoda, Hirotake Yamagishi +1 more | 2002-07-16 |
| 6387182 | Apparatus and method for processing substrate | Yukio Fukunaga, Naoaki Ogure, Tsutomu Nakada, Masahito Abe, Mitsunao Shibasaki +3 more | 2002-05-14 |