Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6417072 | Method of forming STI oxide regions and alignment marks in a semiconductor structure with one masking step | Renzo Maccagnan, Philippe Lacombe | 2002-07-09 |
| 6363294 | Method and system for semiconductor wafer fabrication process real-time in-situ interactive supervision | Jean Canteloup, Renzo Maccagnan, Jean-Phillippe Vassilakis | 2002-03-26 |
| 6342452 | Method of fabricating a Si3N4/polycide structure using a dielectric sacrificial layer as a mask | Pascal Costaganna, Lars Heineck | 2002-01-29 |