Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6363294 | Method and system for semiconductor wafer fabrication process real-time in-situ interactive supervision | Philippe Coronel, Renzo Maccagnan, Jean-Phillippe Vassilakis | 2002-03-26 |