Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6342452 | Method of fabricating a Si3N4/polycide structure using a dielectric sacrificial layer as a mask | Philippe Coronel, Lars Heineck | 2002-01-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6342452 | Method of fabricating a Si3N4/polycide structure using a dielectric sacrificial layer as a mask | Philippe Coronel, Lars Heineck | 2002-01-29 |