Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6445442 | Projection-microlithographic device | Rudolf Von Bünau, Jorg Schultz | 2002-09-03 |
| 6438199 | Illumination system particularly for microlithography | Jorg Schultz, Karl-Heinz Schuster, Udo Dinger, Wolfgang Singer, Martin Antoni | 2002-08-20 |
| 6400794 | Illumination system, particularly for EUV lithography | Jorg Schultz | 2002-06-04 |
| 6366410 | Reticular objective for microlithography-projection exposure installations | Jorg Schultz, Karl-Heinz Schuster | 2002-04-02 |