Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6466382 | Optical arrangement | Werner Müller-Rissmann, Hubert Holderer, Christian Wagner, Jochen Becker, Stefan Xalter +1 more | 2002-10-15 |
| 6445442 | Projection-microlithographic device | Jorg Schultz, Johannes Wangler | 2002-09-03 |