Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6463119 | Exposure method, exposure apparatus and semiconductor manufacturing apparatus | Takeshi Miyachi, Yutaka Watanabe, Kazuyuki Kasumi | 2002-10-08 |
| 6453000 | Exposure method, exposure device and semiconductor device manufacturing method | Hideki Ina | 2002-09-17 |
| 6418187 | X-ray mask structure, and X-ray exposure method and apparatus using the same | Keiko Chiba | 2002-07-09 |
| 6351512 | X-ray exposure apparatus | Yutaka Watanabe | 2002-02-26 |