Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6455203 | Mask structure and method of manufacturing the same | Mitsuaki Amemiya, Shunichi Uzawa | 2002-09-24 |
| 6449332 | Exposure apparatus, and device manufacturing method | — | 2002-09-10 |
| 6418187 | X-ray mask structure, and X-ray exposure method and apparatus using the same | Shigeru Terashima | 2002-07-09 |
| 6337161 | Mask structure exposure method | Hideo Kato, Hiroshi Maehara | 2002-01-08 |