Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479212 | Photosensitive resin, resist composition using the photosensitive resin, pattern formation method using the resist composition, device produced by the pattern formation method, and exposure method | Minoru Matsuda, Keita Sakai | 2002-11-12 |
| 6476968 | Optical element | Hideo Kato | 2002-11-05 |
| 6421188 | Optical element | — | 2002-07-16 |
| 6337161 | Mask structure exposure method | Keiko Chiba, Hideo Kato | 2002-01-08 |