Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6463119 | Exposure method, exposure apparatus and semiconductor manufacturing apparatus | Shigeru Terashima, Takeshi Miyachi, Yutaka Watanabe | 2002-10-08 |
| 6381005 | Mask holding device, exposure apparatus and device manufacturing method | Takeshi Miyachi | 2002-04-30 |