Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486045 | Apparatus and method for forming deposited film | Takashi Otsuka, Tatsuyuki Aoike, Toshiyasu Shirasuna, Kazuyoshi Akiyama, Hitoshi Murayama +1 more | 2002-11-26 |
| 6443191 | Vacuum processing methods | Hitoshi Murayama, Tatsuyuki Aoike, Toshiyasu Shirasuna, Kazuyoshi Akiyama, Takashi Ohtsuka +2 more | 2002-09-03 |
| 6350497 | Plasma processing method | Hitoshi Murayama, Toshiyasu Shirasuna, Ryuji Okamura, Kazuyoshi Akiyama, Takashi Ohtsuka | 2002-02-26 |
| 6347601 | Film forming apparatus | Toshiyasu Shirasuna, Kazuhiko Takada, Ryuji Okamura, Kazuyoshi Akiyama, Hitoshi Murayama | 2002-02-19 |