Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486045 | Apparatus and method for forming deposited film | Takashi Otsuka, Toshiyasu Shirasuna, Kazuyoshi Akiyama, Hitoshi Murayama, Daisuke Tazawa +1 more | 2002-11-26 |
| 6443191 | Vacuum processing methods | Hitoshi Murayama, Toshiyasu Shirasuna, Kazuyoshi Akiyama, Takashi Ohtsuka, Daisuke Tazawa +2 more | 2002-09-03 |