Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6398032 | SMIF pod including independently supported wafer cassette | Anthony C. Bonora, Raymond S. Martin, Perry Peterson | 2002-06-04 |
| 6364595 | Reticle transfer system | Anthony C. Bonora, Joshua W. Shenk | 2002-04-02 |