Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6430877 | Pod door alignment device | Frederick T. Rosenquist | 2002-08-13 |
| 6398032 | SMIF pod including independently supported wafer cassette | William J. Fosnight, Anthony C. Bonora, Raymond S. Martin | 2002-06-04 |